MOVPE growth of GaAs, AlGaAs, InP, InGaAs and InGaAsP using all-organometallic sources

M. Sopanen, H. Lipsanen, T. Koljonen, J. Ahopelto, M. Taskinen

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Pages22-24
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameOptoelectronics Laboratory, Annual Report 1993
    PublisherTKK
    No.TKK-F-C160

    Keywords

    • movpe, GaAs, AlGaAs, InP, InGaAs, InGaAsP

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