Molecular dynamics study of oxygen defects in silicon

P.J. Grönberg, J. von Boehm, R.M. Nieminen

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationEarly Stages of Oxygen Precipitation in Silicon
EditorsR. Jones
Place of PublicationThe Netherlands
PublisherKluwer Academic Publishers
Pages441-446
Publication statusPublished - 1996
MoE publication typeA3 Book section, Chapters in research books

Keywords

  • molecular dynamics
  • oxygen defect
  • silicon

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