Molecular control of interface chemistry by atomic layer deposition (ALD), A case study on novel gas-solid interactions of aminoalkoxysilanes with silica

Eero Iiskola, Satu Ek

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Pages141
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAVS Topical Conference on Atomic Layer Deposition, Helsinki, August 16-18, 2004
    PublisherAmerican Vacuum Society

    Keywords

    • ALD
    • atomic layer deposition
    • porous silica

    Cite this