@techreport{1c25795df4374a08825731f121b9f862,
title = "Molecular control of interface chemistry by atomic layer deposition (ALD), A case study on novel gas-solid interactions of aminoalkoxysilanes with silica",
keywords = "ALD, atomic layer deposition, porous silica, ALD, atomic layer deposition, porous silica, ALD, atomic layer deposition, porous silica",
author = "Eero Iiskola and Satu Ek",
year = "2004",
language = "English",
series = "AVS Topical Conference on Atomic Layer Deposition, Helsinki, August 16-18, 2004",
publisher = "American Vacuum Society",
pages = "141",
type = "WorkingPaper",
institution = "American Vacuum Society",
}