Modified porous silicon surfaces as DIOS-MS sample plates

S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho

Research output: Working paperProfessional

Original languageEnglish
Pages503
Publication statusPublished - 2002
MoE publication typeD4 Published development or research report or study

Publication series

NameMicroTAS 2002, Nara, Japan

Keywords

  • electrochemical etching
  • mass spectrometry
  • porous silicon
  • silicon

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