Modelling of surfactant mass balance for microvia fill monitoring

A. Pohjoranta; R. Tenno

Modelling of surfactant mass balance for microvia fill monitoring

A. Pohjoranta, R. Tenno

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	2007 International Symposium on High Density Packaging and Microsystem Integration (HDP’07), Shanghai, China, June 26-June 28, 2007
Place of Publication	Shanghai, China
Publisher	IEEE
Pages	4
Publication status	Published - 2007
MoE publication type	A4 Conference publication

Cite this

@inproceedings{b839ce06fb5140bdb6f419aee2f0193f,

title = "Modelling of surfactant mass balance for microvia fill monitoring",

author = "A. Pohjoranta and R. Tenno",

year = "2007",

language = "English",

pages = "4",

booktitle = "2007 International Symposium on High Density Packaging and Microsystem Integration (HDP{\textquoteright}07), Shanghai, China, June 26-June 28, 2007",

publisher = "IEEE",

address = "United States",

}

Modelling of surfactant mass balance for microvia fill monitoring. / Pohjoranta, A.; Tenno, R.
2007 International Symposium on High Density Packaging and Microsystem Integration (HDP’07), Shanghai, China, June 26-June 28, 2007. Shanghai, China: IEEE, 2007. p. 4.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review