Modelling and validation of air damping in perforated gold and silicon MEMS plates

Giorgio De Pasquale, Timo Veijola, Aurelio Somà

    Research output: Contribution to journalArticleScientificpeer-review

    56 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)015010
    JournalJournal of Micromechanics and Microengineering
    Volume20
    Issue number1
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

    Keywords

    • gas damping
    • MEMS
    • modelling
    • perforated plate

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