Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator

Antti Haarahiltunen, Aapo Varpula, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
18 Downloads (Pure)
Original languageEnglish
JournalJournal of Applied Physics
Volume110
Issue number4
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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