Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator

Antti Haarahiltunen, Aapo Varpula, Hele Savin

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@article{d6306e42eff54c8595fd24334dd635f4,

title = "Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator",

author = "Antti Haarahiltunen and Aapo Varpula and Hele Savin",

year = "2011",

doi = "10.1063/1.3622511",

language = "English",

volume = "110",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}