Modeling phosphorus diffusion gettering of iron in single crystal silicon

Antti Haarahiltunen, Hele Savin, Marko Yli-Koski, Heli Talvitie, Juha Sinkkonen

    Research output: Contribution to journalArticleScientificpeer-review

    44 Citations (Scopus)
    19 Downloads (Pure)
    Original languageEnglish
    Pages (from-to)4
    JournalJournal of Applied Physics
    Volume105
    Issue number2
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Keywords

    • gettering
    • iron
    • phosphorus
    • silicon

    Cite this