Modeling of Silicon Slot Waveguides Filled with Atomic Layer Deposition

S. Honkanen, A. Tervonen, A. Säynätjoki, A. Khanna, T. Alasaarela, J. Turunen, B. Bai

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationJapan-Finland Joint Symposium on Optics in Engineering Tokyo, September 3-5, 2009
    Place of PublicationTokio, Japan
    Pages2
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer deposition
    • Si-photonics

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