Modeling of Nonlinear Micromechanical Resonators and their Simulation with Harmonic-Balance Method

T. Veijola, T. Mattila

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Pages22
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameCircuit Theory Laboratory Report Series
    PublisherHelsinki University of Technology, Circuit Theory Laboratory
    No.CT-42
    ISSN (Print)1239-8233

    Keywords

    • electrical-equivalent circuit
    • electromechanical transducer
    • harmonic-balance simulation
    • MEMS
    • micromechanical resonator
    • nonlinear device modelling

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