Modeling of Nonlinear Micromechanical Resonators and Their Simulation with the Harmonic-Balance Method

Timo Veijola, Tomi Mattila

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)310-321
    JournalInternational Journal of RF and Microwave Computer-Aided Engineering
    Issue number5
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed


    • electrical-equivalent circuit
    • electromechanical transducer
    • harmonic-balance simulation
    • micromechanical resonator
    • nonlinear device modeling

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