Modeling and optimization of internal gettering of iron in silicon

Antti Haarahiltunen, Hele Väinölä, Olli Anttila, Marko Yli-Koski, Juha Sinkkonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Title of host publicationElectrochemical Society Fall 2006 Meeting (29.10. -3.11. Cancun, Mexico)
    PublisherThe Electrochemical Society
    Pages273-278
    ISBN (Print)19385-862
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

    Publication series

    Name
    PublisherThe Electrochemical Society
    ISSN (Print)1938-5862

    Keywords

    • internal gettering
    • iron
    • silicon
    • simulation

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