@inproceedings{0ca97853314143e187ea64e0ee29ce10,
title = "Model of Capacitive Micromechanical Accelerometer Including Effect of Squeezed Gas Film",
keywords = "accelerometer, APLAC, circuit simulation model, gas damping, squeezed film effect, accelerometer, APLAC, circuit simulation model, gas damping, squeezed film effect, accelerometer, APLAC, circuit simulation model, gas damping, squeezed film effect",
author = "T. Veijola and T. Ryh{\"a}nen",
year = "1995",
language = "English",
pages = "664--887",
booktitle = "IEEE Int. Symp. on Circuits and Systems (ISCAS'95), Seattle, USA",
}