Model of Capacitive Micromechanical Accelerometer Including Effect of Squeezed Gas Film

T. Veijola, T. Ryhänen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Title of host publicationIEEE Int. Symp. on Circuits and Systems (ISCAS'95), Seattle, USA
    Place of PublicationSeattle, USA
    Pages664-887
    Publication statusPublished - 1995
    MoE publication typeA4 Article in a conference publication

    Keywords

    • accelerometer
    • APLAC
    • circuit simulation model
    • gas damping
    • squeezed film effect

    Cite this