@inproceedings{cdea19fda1e84134ae0e6e71bc7f5b99,
title = "Model for gas film damping in a silicon accelerometer",
keywords = "accommodation coefficient, effective viscosity, gas film damping, accommodation coefficient, effective viscosity, gas film damping, accommodation coefficient, effective viscosity, gas film damping",
author = "T. Veijola and H. Kuisma and J. Lahdenper{\"a}",
year = "1997",
language = "English",
volume = "2",
pages = "1097--1100",
booktitle = "TRANSDUCERS '97, Chicago 15-20.6.97",
publisher = "IEEE",
address = "United States",
}