Model for GAS Film Damping in a Silicon Accelerometer

T. Veijola, H. Kuisma, J. Lahdenperä

    Research output: Working paperProfessional

    41 Citations (Scopus)
    Original languageEnglish
    Place of PublicationEspoo
    Pages27
    Publication statusPublished - 1997
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameCircuit Theory Laboratory Report Series
    PublisherHelsinki University of Technology, Circuit Theory Laboratory
    No.CT-29
    ISSN (Print)1239-8233

    Keywords

    • accelerometer model
    • effective viscosity
    • gas film damping
    • rarefied gas flow

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