Model for Gas Damping in Air Gaps of RF MEMS Resonators

Timo Veijola, Anu Lehtovuori

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationSymposium on DTIP of MEMS & MOEMS, Stresa, Italy, 25-27 April 2007
    EditorsK. Chakrabarty, B. Courtois, E. Jung, V. Kempe, R. Laur
    Place of PublicationStresa, Italy
    Pages156-161
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • Gas damping, Air gap resonance, RF MEMS resonator

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