@inproceedings{bfcc383230a447638401edddc3af4cab,
title = "Model for Gas Damping in Air Gaps of RF MEMS Resonators",
keywords = "Gas damping, Air gap resonance, RF MEMS resonator, Gas damping, Air gap resonance, RF MEMS resonator, Gas damping, Air gap resonance, RF MEMS resonator",
author = "Timo Veijola and Anu Lehtovuori",
year = "2007",
language = "English",
isbn = "978-2-35500-000-3",
pages = "156--161",
editor = "K. Chakrabarty and B. Courtois and E. Jung and V. Kempe and R. Laur",
booktitle = "Symposium on DTIP of MEMS & MOEMS, Stresa, Italy, 25-27 April 2007",
}