MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulator Structure
- Glenn Ross
- , Ville Luntinen
- , Mikael Broas
- , Sami Suihkonen
- , Turkka Tuomi
- , Aapo Lankinen
- , Andreas Danilewsky
- , Markku Tilli
- , Mervi Paulasto-Kröckel
- Okmetic Oy
- Aalto-yliopisto
- Albert-Ludwigs-Universität Freiburg
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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