Mikrosysteemit

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationMekatroniikan tutkijaseminaarin esitelmäkooste (syksy 2002)
    EditorsMauri Airila
    Place of PublicationEspoo
    Pages180
    Publication statusPublished - 2002
    MoE publication typeA3 Part of a book or another research book

    Keywords

    • mechatronics
    • MEMS
    • micro actuators
    • micro sensors
    • micro systems

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