Mikrosysteemit

Mauri Airila

Mikrosysteemit

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Original language	English
Title of host publication	Mekatroniikan tutkijaseminaarin esitelmäkooste (syksy 2002)
Editors	Mauri Airila
Place of Publication	Espoo
Pages	180
Publication status	Published - 2002
MoE publication type	A3 Book section, Chapters in research books

Keywords

mechatronics
MEMS
micro actuators
micro sensors
micro systems

Cite this

@inbook{b1bb7259493e4b3cad8f511f391fcf10,

title = "Mikrosysteemit",

keywords = "mechatronics, MEMS, micro actuators, micro sensors, micro systems, mechatronics, MEMS, micro actuators, micro sensors, micro systems, mechatronics, MEMS, micro actuators, micro sensors, micro systems",

author = "Mauri Airila",

year = "2002",

language = "English",

pages = "180",

editor = "Mauri Airila",

booktitle = "Mekatroniikan tutkijaseminaarin esitelm{\"a}kooste (syksy 2002)",

}

TY - CHAP

T1 - Mikrosysteemit

AU - Airila, Mauri

PY - 2002

Y1 - 2002

KW - mechatronics

KW - MEMS

KW - micro actuators

KW - micro sensors

KW - micro systems

KW - mechatronics

KW - MEMS

KW - micro actuators

KW - micro sensors

KW - micro systems

KW - mechatronics

KW - MEMS

KW - micro actuators

KW - micro sensors

KW - micro systems

M3 - Chapter

SP - 180

BT - Mekatroniikan tutkijaseminaarin esitelmäkooste (syksy 2002)

A2 - Airila, Mauri

CY - Espoo

ER -