Microwave MEMS devices designed for process robustness and operational reliability

Mikael Sterner, Nutapong Somjit, Umer Shah, Sergey Dudorov, Dmitry Chicherin, Antti V. Räisänen, Joachim Oberhammer

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)547-563
    JournalInternational Journal of Microwave and Wireless Technologies
    Volume3
    Issue number5
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Keywords

    • MEMS

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