Original language | English |
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Pages (from-to) | 1414-1400 |
Journal | Journal of Mathematical Chemistry |
Volume | 52 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Microvia fill process model and control
Antti Pohjoranta, Robert Tenno
Research output: Contribution to journal › Article › Scientific › peer-review
10
Citations
(Scopus)