Microvia fill process model and control

Antti Pohjoranta, Robert Tenno

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1414-1400
JournalJournal of Mathematical Chemistry
Volume52
Issue number5
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Cite this