Microvia fill process control

Robert Tenno, Antti Pohjoranta

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)883-893
    JournalInternational Journal of Control
    Volume82
    Issue number5
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Keywords

    • distributed parameter system
    • optimisation
    • process control

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