Microsystems and nanotechnology in the Nordic region

S. Franssila, L. Furuberg, P. Enoksson, F. Grey, A. Larsen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProc. 8th Worl Micromachine Summit, Maastricht, 2002
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication

Keywords

  • MEMS
  • microsystems
  • nanotechnology
  • Nordic

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