Microstructural modification of ALE-grown SnO2 with the aid of oxygen and hydrocarbon process additives

M. Utriainen, K. Kovacs, J. Campell, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997
    EditorsA. Rosental
    Place of PublicationTartto
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication


    • atomic layer epitaxy
    • chemical sensor
    • gas sensor
    • metal oxide
    • thin film

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