Microstructural modification of ALE-grown SnO2 with the aid of oxygen and hydrocarbon process additives

M. Utriainen, K. Kovacs, J. Campell, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997
    EditorsA. Rosental
    Place of PublicationTartto
    Pages23
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy
    • chemical sensor
    • gas sensor
    • metal oxide
    • thin film

    Cite this

    Utriainen, M., Kovacs, K., Campell, J., & Niinistö, L. (1997). Microstructural modification of ALE-grown SnO2 with the aid of oxygen and hydrocarbon process additives. In A. Rosental (Ed.), The 4th Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997 (pp. 23).