Microscopic Mechanisms of Cobalt Disilicide Nucleation in Silicon

V.A. Borodin, M.-O. Ruault, M.G. Ganchenkova, F. Fortuna

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (Scopus)

Cite this

@article{929e6eb9f5a340b7816f1eeacfd36187,

title = "Microscopic Mechanisms of Cobalt Disilicide Nucleation in Silicon",

author = "V.A. Borodin and M.-O. Ruault and M.G. Ganchenkova and F. Fortuna",

year = "2005",

language = "English",

volume = "108-109",

pages = "133",

journal = "Solid State Phenomena",

issn = "1662-9779",

publisher = "Trans Tech Publications",

}