Microresonators with active post-processing gap adjustment

Mika Koskenvuori; P. Rantakari; J. Väisäsvaara; I. Tittonen; A. Mattila; A. Oja; V. Kaajakari; H. Seppä; H. Kattelus; J. Kiihamäki

Microresonators with active post-processing gap adjustment

Mika Koskenvuori
, P. Rantakari
, J. Väisäsvaara
, I. Tittonen
, A. Mattila
, A. Oja
, V. Kaajakari
, H. Seppä
, H. Kattelus
, J. Kiihamäki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	XXXVII Annual Conference of Finnish Physical Society, Helsinki, April 2003
Pages	07
Publication status	Published - 2003
MoE publication type	A4 Conference publication

Keywords

micromechanics
rf-mems
tunable capacitor

Cite this

@inproceedings{1d46bc64e48f492ab247ec99f5109200,

title = "Microresonators with active post-processing gap adjustment",

keywords = "micromechanics, rf-mems, tunable capacitor, micromechanics, rf-mems, tunable capacitor, micromechanics, rf-mems, tunable capacitor",

author = "Mika Koskenvuori and P. Rantakari and J. V{\"a}is{\"a}svaara and I. Tittonen and A. Mattila and A. Oja and V. Kaajakari and H. Sepp{\"a} and H. Kattelus and J. Kiiham{\"a}ki",

year = "2003",

language = "English",

pages = "07",

booktitle = "XXXVII Annual Conference of Finnish Physical Society, Helsinki, April 2003",

}

TY - GEN

T1 - Microresonators with active post-processing gap adjustment

AU - Koskenvuori, Mika

AU - Rantakari, P.

AU - Väisäsvaara, J.

AU - Tittonen, I.

AU - Mattila, A.

AU - Oja, A.

AU - Kaajakari, V.

AU - Seppä, H.

AU - Kattelus, H.

AU - Kiihamäki, J.

PY - 2003

Y1 - 2003

KW - micromechanics

KW - rf-mems

KW - tunable capacitor

KW - micromechanics

KW - rf-mems

KW - tunable capacitor

KW - micromechanics

KW - rf-mems

KW - tunable capacitor

M3 - Conference article in proceedings

SP - 07

BT - XXXVII Annual Conference of Finnish Physical Society, Helsinki, April 2003

ER -