Microresonators with active post-processing gap adjustment

Mika Koskenvuori, P. Rantakari, J. Väisäsvaara, I. Tittonen, A. Mattila, A. Oja, V. Kaajakari, H. Seppä, H. Kattelus, J. Kiihamäki

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationXXXVII Annual Conference of Finnish Physical Society, Helsinki, April 2003
Pages07
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication

Keywords

  • micromechanics
  • rf-mems
  • tunable capacitor

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