Microrefrigeration by quasiparticle tunnelling in NIS and SIS junctions

Research output: Contribution to journalArticleScientificpeer-review


  • J. P. Pekola
  • A. J. Manninen
  • M. M. Leivo
  • K. Arutyunov
  • J. K. Suoknuuti
  • T. I. Suppula
  • B. Collaudin

Research units

  • University of Jyväskylä


A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.


Original languageEnglish
Pages (from-to)485-490
Number of pages6
JournalPhysica B: Condensed Matter
Issue number1-4
Publication statusPublished - 11 May 2000
MoE publication typeA1 Journal article-refereed

ID: 4435795