Micromechanics in silicon

T. Juvonen, J. Poulsen, S. Franssila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Micro Structure Workshop 2002, Aronsborg, Bålsta
Pages	paper B5
Publication status	Published - 2002
MoE publication type	A4 Conference publication

Keywords

@inproceedings{ed7424e1205f4b28a0183ae65e0e16be,

title = "Micromechanics in silicon",

keywords = "111, micromechanics, silicon, wet etching, 111, micromechanics, silicon, wet etching, 111, micromechanics, silicon, wet etching",

author = "T. Juvonen and J. Poulsen and S. Franssila",

year = "2002",

language = "English",

pages = "paper B5",

booktitle = "Micro Structure Workshop 2002, Aronsborg, B{\aa}lsta",

}

TY - GEN

T1 - Micromechanics in silicon

AU - Juvonen, T.

AU - Poulsen, J.

AU - Franssila, S.

PY - 2002

Y1 - 2002

KW - 111

KW - micromechanics

KW - silicon

KW - wet etching

KW - 111

KW - micromechanics

KW - silicon

KW - wet etching

KW - 111

KW - micromechanics

KW - silicon

KW - wet etching

M3 - Conference article in proceedings

SP - paper B5

BT - Micro Structure Workshop 2002, Aronsborg, Bålsta

ER -