Micromechanical resonators: Fabrication and characterization

P. Seppälä, O. Jaakkola, J. Karttunen, J. Kiihamäki, T. Lamminmäki, T. Mattila, A. Oja, K. Ruokonen, H. Seppä

Research output: Working paperProfessional

Original languageEnglish
Pagespaper 5.20
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameThe XXXIV Annual Conference of the Finnish Physical Society, Espoo, Finland, March 9-11, 2000

Keywords

  • DRIE
  • Q-factor
  • resonator
  • SOI

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