Micromechanical resonators: Fabrication and characterization

P. Seppälä; O. Jaakkola; J. Karttunen; J. Kiihamäki; T. Lamminmäki; T. Mattila; A. Oja; K. Ruokonen; H. Seppä

Micromechanical resonators: Fabrication and characterization

P. Seppälä, O. Jaakkola, J. Karttunen, J. Kiihamäki, T. Lamminmäki, T. Mattila, A. Oja, K. Ruokonen, H. Seppä

Department of Signal Processing and Acoustics

Research output: Working paper › Professional

Original language	English
Pages	paper 5.20
Publication status	Published - 2000
MoE publication type	D4 Published development or research report or study

Publication series

Name	The XXXIV Annual Conference of the Finnish Physical Society, Espoo, Finland, March 9-11, 2000

Keywords

DRIE
Q-factor
resonator
SOI

Cite this

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title = "Micromechanical resonators: Fabrication and characterization",

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author = "P. Sepp{\"a}l{\"a} and O. Jaakkola and J. Karttunen and J. Kiiham{\"a}ki and T. Lamminm{\"a}ki and T. Mattila and A. Oja and K. Ruokonen and H. Sepp{\"a}",

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language = "English",

series = "The XXXIV Annual Conference of the Finnish Physical Society, Espoo, Finland, March 9-11, 2000",

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TY - UNPB

T1 - Micromechanical resonators: Fabrication and characterization

AU - Seppälä, P.

AU - Jaakkola, O.

AU - Karttunen, J.

AU - Kiihamäki, J.

AU - Lamminmäki, T.

AU - Mattila, T.

AU - Oja, A.

AU - Ruokonen, K.

AU - Seppä, H.

PY - 2000

Y1 - 2000

KW - DRIE

KW - Q-factor

KW - resonator

KW - SOI

KW - DRIE

KW - Q-factor

KW - resonator

KW - SOI

KW - DRIE

KW - Q-factor

KW - resonator

KW - SOI

M3 - Working paper

T3 - The XXXIV Annual Conference of the Finnish Physical Society, Espoo, Finland, March 9-11, 2000

SP - paper 5.20

BT - Micromechanical resonators: Fabrication and characterization

ER -