Micromechanical HIGH-Q oscillators for the detection of weak forces

K. Nera, O. Hahtela, K. Lahti, T. Lamminmäki, K. Ruokonen, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationXXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001
Pages107
Publication statusPublished - 2001
MoE publication typeA4 Article in a conference publication

Keywords

  • HIGH-Q
  • micromechanics
  • oscillators

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