Micromanipulation transfer of membrane resonators for circuit optomechanics

Maria Berdova, Sung Un Cho, Juha-Matti Pirkkalainen, Jaakko Sulkko, Xuefeng Song, Pertti J Hakonen, Mika A Sillanpää

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Article number125024
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number12
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

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