@inproceedings{8b5c360ae52b4df88fe762085d0662b6,
title = "Microglow: a microsystems laboratory course",
keywords = "education, laboratory course, MEMS, microglow, microsystems, education, laboratory course, MEMS, microglow, microsystems, education, laboratory course, MEMS, microglow, microsystems",
author = "S. Franssila and I. Tittonen and K. Grigoras and Tuuli Juvonen and Kaisa Nera and Paula Heikkil{\"a}",
year = "2002",
language = "English",
pages = "paper A12",
booktitle = "Micro Structure Workshop 2002, Aronsborg, B{\aa}lsta",
}