Microglow: a microsystems laboratory course

S. Franssila; I. Tittonen; K. Grigoras; Tuuli Juvonen; Kaisa Nera; Paula Heikkilä

Microglow: a microsystems laboratory course

S. Franssila, I. Tittonen, K. Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä

School services, ELEC

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Micro Structure Workshop 2002, Aronsborg, Bålsta
Pages	paper A12
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication

Keywords

education
laboratory course
MEMS
microglow
microsystems

Cite this

@inproceedings{8b5c360ae52b4df88fe762085d0662b6,

title = "Microglow: a microsystems laboratory course",

keywords = "education, laboratory course, MEMS, microglow, microsystems, education, laboratory course, MEMS, microglow, microsystems, education, laboratory course, MEMS, microglow, microsystems",

author = "S. Franssila and I. Tittonen and K. Grigoras and Tuuli Juvonen and Kaisa Nera and Paula Heikkil{\"a}",

year = "2002",

language = "English",

pages = "paper A12",

booktitle = "Micro Structure Workshop 2002, Aronsborg, B{\aa}lsta",

}

TY - GEN

T1 - Microglow: a microsystems laboratory course

AU - Franssila, S.

AU - Tittonen, I.

AU - Grigoras, K.

AU - Juvonen, Tuuli

AU - Nera, Kaisa

AU - Heikkilä, Paula

PY - 2002

Y1 - 2002

KW - education

KW - laboratory course

KW - MEMS

KW - microglow

KW - microsystems

KW - education

KW - laboratory course

KW - MEMS

KW - microglow

KW - microsystems

KW - education

KW - laboratory course

KW - MEMS

KW - microglow

KW - microsystems

M3 - Conference contribution

SP - paper A12

BT - Micro Structure Workshop 2002, Aronsborg, Bålsta

ER -