Microglow: a microsystems laboratory course

S. Franssila, I. Tittonen, K. Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationMicro Structure Workshop 2002, Aronsborg, Bålsta
Pagespaper A12
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication

Keywords

  • education
  • laboratory course
  • MEMS
  • microglow
  • microsystems

Cite this