Microfluidics and BioMEMS in silicon

Sami Franssila; Cristina Davis; Michael K. LeVasseur; Zhu Cao; Levent Yobas

Microfluidics and BioMEMS in silicon

Sami Franssila
, Cristina Davis
, Michael K. LeVasseur
, Zhu Cao
, Levent Yobas

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Original language	English
Title of host publication	Handbook of silicon based MEMS materials and technologies, 2nd edition
Editors	Sami Franssila, Markku Tilli, Veikko Lindroos, Teruaki Motooka, Veli-Matti Airaksinen, Mervi Paulasto-Krockel
Place of Publication	Lontoo
Publisher	Elsevier
Pages	565-581
ISBN (Electronic)	978-0-08-094772-3
ISBN (Print)	978-0-323-29965-7
Publication status	Published - 2015
MoE publication type	A3 Book section, Chapters in research books

Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@inbook{bb90ddabdef04ee09701b4c8c11bcd3e,

title = "Microfluidics and BioMEMS in silicon",

author = "Sami Franssila and Cristina Davis and LeVasseur, \{Michael K.\} and Zhu Cao and Levent Yobas",

year = "2015",

language = "English",

isbn = "978-0-323-29965-7",

pages = "565--581",

editor = "Sami Franssila and Markku Tilli and Veikko Lindroos and Teruaki Motooka and Veli-Matti Airaksinen and Mervi Paulasto-Krockel",

booktitle = "Handbook of silicon based MEMS materials and technologies, 2nd edition",

publisher = "Elsevier",

address = "Netherlands",

}

Microfluidics and BioMEMS in silicon. / Franssila, Sami; Davis, Cristina; LeVasseur, Michael K. et al.
Handbook of silicon based MEMS materials and technologies, 2nd edition. ed. / Sami Franssila; Markku Tilli; Veikko Lindroos; Teruaki Motooka; Veli-Matti Airaksinen; Mervi Paulasto-Krockel. Lontoo: Elsevier, 2015. p. 565-581.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

TY - CHAP

T1 - Microfluidics and BioMEMS in silicon

AU - Franssila, Sami

AU - Davis, Cristina

AU - LeVasseur, Michael K.

AU - Cao, Zhu

AU - Yobas, Levent

PY - 2015

Y1 - 2015

M3 - Chapter

SN - 978-0-323-29965-7

SP - 565

EP - 581

BT - Handbook of silicon based MEMS materials and technologies, 2nd edition

A2 - Franssila, Sami

A2 - Tilli, Markku

A2 - Lindroos, Veikko

A2 - Motooka, Teruaki

A2 - Airaksinen, Veli-Matti

A2 - Paulasto-Krockel, Mervi

PB - Elsevier

CY - Lontoo

ER -

Microfluidics and BioMEMS in silicon

Equipment

Raw Materials Research Infrastructure

Cite this