Microfluidics and BioMEMS in silicon

Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationHandbook of silicon based MEMS materials and technologies, 2nd edition
EditorsSami Franssila, Markku Tilli, Veikko Lindroos, Teruaki Motooka, Veli-Matti Airaksinen, Mervi Paulasto-Krockel
Place of PublicationLontoo
PublisherElsevier
Pages565-581
ISBN (Electronic)978-0-08-094772-3
ISBN (Print)978-0-323-29965-7
Publication statusPublished - 2015
MoE publication typeA3 Part of a book or another research book

Cite this