Microfluidic Nebulizer Chip for Mass Spectrometry

S. Franssila, P. Östman, S. Marttila, T. Kotiaho, R. Kostiainen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationMicroStructure Workshop MSW '04, Ystad, Sweden March 29-31 2004
EditorsJohan Nilsson, Thomas Laurell
Place of PublicationLund, Sweden
PublisherLund University in collaboration with Colibri Pro Development and Swedish Foundation for Strategic Research
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

Keywords

  • microsystems, MEMS, microfluidics, BioMEMS
  • RF-MEMS, microfabrication, micromachining, microsensors,
  • ultrasonics

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