Microflidic heated gas jet shape analysis by temperature scanning

Ville Saarela, Markus Haapala, Risto Kostiainen, Tapani Kotiaho, Sami Franssila

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume19
    Issue number5
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Keywords

    • gas jet shape
    • temperature scanning

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