Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

M. Wirtssohn, Markus Haapala, Lauri Sainiemi, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)6
JournalJournal of Micromechanics and Microengineering
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

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