Microfabricated silicon cantilever for acousta-optical sensing

Päivi Sievilä; Ossi Hahtela; Nikolai Chekuron; Jyrki Kauppinen; Ilkka Tittonen

Microfabricated silicon cantilever for acousta-optical sensing

Päivi Sievilä, Ossi Hahtela, Nikolai Chekuron, Jyrki Kauppinen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Physics Days, Tallinn, Estonia 15-17 March 2007
Publication status	Published - 2007
MoE publication type	A4 Conference publication

Keywords

acousto-optics
micromechanics
silicon cantilever
transducer

Cite this

@inproceedings{da732882a7c94924b43eca1b0366daff,

title = "Microfabricated silicon cantilever for acousta-optical sensing",

keywords = "acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer",

author = "P{\"a}ivi Sievil{\"a} and Ossi Hahtela and Nikolai Chekuron and Jyrki Kauppinen and Ilkka Tittonen",

year = "2007",

language = "English",

booktitle = "Physics Days, Tallinn, Estonia 15-17 March 2007",

}

TY - GEN

T1 - Microfabricated silicon cantilever for acousta-optical sensing

AU - Sievilä, Päivi

AU - Hahtela, Ossi

AU - Chekuron, Nikolai

AU - Kauppinen, Jyrki

AU - Tittonen, Ilkka

PY - 2007

Y1 - 2007

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

KW - acousto-optics

KW - micromechanics

KW - silicon cantilever

KW - transducer

M3 - Conference article in proceedings

BT - Physics Days, Tallinn, Estonia 15-17 March 2007

ER -