Microfabricated silicon cantilever for acousta-optical sensing

Päivi Sievilä, Ossi Hahtela, Nikolai Chekuron, Jyrki Kauppinen, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationPhysics Days, Tallinn, Estonia 15-17 March 2007
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • acousto-optics
    • micromechanics
    • silicon cantilever
    • transducer

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