| Original language | English |
|---|---|
| Patent number | EP 2761666 B1 |
| Publication status | Published - 7 Jul 2023 |
| MoE publication type | H1 Granted patent |
METHOD OF DECREASING AN EXCESS CARRIER INDUCED DEGRADATION IN A SILICON SUBSTRATE
Hele Savin (Inventor), Antti Haarahiltunen (Inventor), Marko Yli-Koski (Inventor)
Research output: Patent