Method for phase sensitive measurements of surface vibrations using homodyne interferometry without stabilization

Lauri Lipiäinen, Kimmo Kokkonen, Olli Holmgren, Matti Kaivola

Research output: Working paperProfessional

2 Citations (Scopus)
Original languageEnglish
Pages1652-1655
Publication statusPublished - 2009
MoE publication typeD4 Published development or research report or study

Publication series

NameIEEE International Ultrasonics Symposium, Rome, September 19-23, 2009

Keywords

  • BAW
  • laser interferometry
  • MEMS
  • Michelson interferometer
  • SAW

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