Method for decreasing an excess carrier induced degradation in a silicon substrate

Hele Savin (Inventor), Antti Haarahiltunen (Inventor), Marko Yli-Koski (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS9306097
Priority date05/04/2016
Filing date01/10/2012
Publication statusPublished - 5 Apr 2016
MoE publication typeH1 Granted patent

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