Method and apparatus

Samiul Haque; Reijo K. Lehtiniemi; Asta M. Kärkkäinen; Lorenz Lechner; Pertti Hakonen

Method and apparatus

Samiul Haque (Inventor), Reijo K. Lehtiniemi (Inventor), Asta M. Kärkkäinen (Inventor), Lorenz Lechner (Inventor), Pertti Hakonen (Inventor)

Nokia Corporation

Research output: Patent

Abstract

A method and apparatus, the method including: forming a recess in a graphene layer wherein the recess creates a boundary between a first portion of the graphene layer and a second portion of the graphene layer; depositing electrically insulating material within the recess; and depositing an electrically conductive material over the insulating material.

Original language	English
Patent number	US8865268B2
IPC	C23C 14/04; H01L 29/16; H01B 1/04
Priority date	28/04/2009
Publication status	Published - 21 Oct 2014
MoE publication type	H1 Granted patent

Cite this

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title = "Method and apparatus",

abstract = "A method and apparatus, the method including: forming a recess in a graphene layer wherein the recess creates a boundary between a first portion of the graphene layer and a second portion of the graphene layer; depositing electrically insulating material within the recess; and depositing an electrically conductive material over the insulating material.",

author = "Samiul Haque and Lehtiniemi, {Reijo K.} and K{\"a}rkk{\"a}inen, {Asta M.} and Lorenz Lechner and Pertti Hakonen",

year = "2014",

month = oct,

day = "21",

language = "English",

type = "Patent",

note = "US8865268B2; C23C 14/04; H01L 29/16; H01B 1/04",

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TY - PAT

T1 - Method and apparatus

AU - Haque, Samiul

AU - Lehtiniemi, Reijo K.

AU - Kärkkäinen, Asta M.

AU - Lechner, Lorenz

AU - Hakonen, Pertti

PY - 2014/10/21

Y1 - 2014/10/21

N2 - A method and apparatus, the method including: forming a recess in a graphene layer wherein the recess creates a boundary between a first portion of the graphene layer and a second portion of the graphene layer; depositing electrically insulating material within the recess; and depositing an electrically conductive material over the insulating material.

AB - A method and apparatus, the method including: forming a recess in a graphene layer wherein the recess creates a boundary between a first portion of the graphene layer and a second portion of the graphene layer; depositing electrically insulating material within the recess; and depositing an electrically conductive material over the insulating material.

UR - https://fi.espacenet.com/publicationDetails/originalDocument?FT=D&date=20141021&DB=&locale=fi_FI&CC=US&NR=8865268B2&KC=B2&ND=4

M3 - Patent

M1 - US8865268B2

ER -

Method and apparatus

Abstract

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