Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces

Elmeri Österlund, Sami Suihkonen, Glenn Ross, Altti Torkkeli, Heikki Kuisma, Mervi Paulasto-Kröckel

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
144 Downloads (Pure)

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