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Dive into the research topics of 'Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication'. Together they form a unique fingerprint.- Sort by
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Kristina Bespalova*, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel
Research output: Contribution to journal › Article › Scientific › peer-review