Metallo organic vapour phase epitaxy of III-V semiconductors

Research output: Working paperProfessional


Research units


Original languageEnglish
Place of PublicationHelsinki
Pagespaper 12:16
Publication statusPublished - 1994
MoE publication typeD4 Published development or research report or study

Publication series

NameReport Series in Physics
PublisherFinnish Physical Society
No.HU-P-260 (1994)

    Research areas

  • metal organic vapour phase epitaxy, semiconductors

ID: 5183000