@techreport{9784ca27f60a4be18e87d5b525714b77,
title = "Metallo organic vapour phase epitaxy of III-V semiconductors",
keywords = "metal organic vapour phase epitaxy, semiconductors, metal organic vapour phase epitaxy, semiconductors, metal organic vapour phase epitaxy, semiconductors",
author = "M. Sopanen and T. Koljonen and H. Lipsanen and M. Taskinen and T. Tuomi",
year = "1994",
language = "English",
series = "Report Series in Physics",
publisher = "Finnish Physical Society",
number = "HU-P-260 (1994)",
pages = "paper 12:16",
type = "WorkingPaper",
institution = "Finnish Physical Society",
}