Metallo organic vapour phase epitaxy of III-V semiconductors

M. Sopanen, T. Koljonen, H. Lipsanen, M. Taskinen, T. Tuomi

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Pagespaper 12:16
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameReport Series in Physics
    PublisherFinnish Physical Society
    No.HU-P-260 (1994)


    • metal organic vapour phase epitaxy
    • semiconductors

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