Metal Oxide and Fluoride ALD Process Development and Optimization for Large Area Depositions

Matti Putkonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication6th AVS meeting and symposium, San Jose, CA. 09.11.2009
    Pagesxx
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

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