| Original language | English |
|---|---|
| Title of host publication | 6th AVS meeting and symposium, San Jose, CA. 09.11.2009 |
| Pages | xx |
| Publication status | Published - 2009 |
| MoE publication type | A4 Article in a conference publication |
Metal Oxide and Fluoride ALD Process Development and Optimization for Large Area Depositions
Matti Putkonen
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review