Abstract
PROCEDURE AND APPARATUS FOR THE COATING OF MATERIALS BY MEANS OF A PULSATING PLASMA BEAM
Original language | Finnish |
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Patent number | FI79351B |
IPC | H01J 37/ 32 A I |
Priority date | 18/01/1988 |
Publication status | Published - 31 Aug 1989 |
MoE publication type | H1 Granted patent |