“MEMS lithography” in Handbook of silicon based MEMS materials and technologies

Sami Franssila, Santeri Tuomikoski, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka

Research output: Book/Report › Book › Professional

Original language	English
Place of Publication	Amsterdam
Publisher	Unknown Publisher
Number of pages	636
Publication status	Published - 2010
MoE publication type	D5 Textbook, professional manual or guide

Cite this

TY - BOOK

T1 - “MEMS lithography” in Handbook of silicon based MEMS materials and technologies

AU - Franssila, Sami

AU - Tuomikoski, Santeri

AU - Lindroos, Veikko

AU - Tilli, Markku

AU - Lehto, Ari

AU - Motooka, Teruaki

PY - 2010

Y1 - 2010

M3 - Book

BT - “MEMS lithography” in Handbook of silicon based MEMS materials and technologies

PB - Unknown Publisher

CY - Amsterdam

ER -