Mechanical silicon resonators for RF electronics

Mika Koskenvuori, T. Lamminmäki, P. Rantakari, I. Tittonen

Research output: Working paperProfessional

Original languageEnglish
Pages111
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameXXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001

Keywords

  • RF mems
  • silicon resonators

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